Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068159 | Methods and apparatus for mask patterning debris removal | Karthik Balakrishnan, Jungrae Park, Sriskantharajah Thirunavukarasu, Eng Sheng Peh | 2024-08-20 |
| 10325790 | Methods and apparatus for correcting substrate deformity | Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Jun-Liang Su, Shoju Vayyapron, Karthik Elumalai +1 more | 2019-06-18 |