Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11929260 | Low warpage curing methodology by inducing curvature | Chin Wei Tan, Jun-Liang Su, Felix Deng, Sai Kumar Kodumuri, Ananthkrishna Jupudi +1 more | 2024-03-12 |
| 11881436 | Pre and post processing metrology apparatus | Jun-Liang Su, Chin Wei Tan | 2024-01-23 |
| 11871667 | Methods and apparatus for warpage correction | Sriskantharajah Thirunavukarasu, Puay Han Tan, Karrthik Parathithasan, Jun-Liang Su, Chin Wei Tan +1 more | 2024-01-09 |
| 11177146 | Methods and apparatus for processing a substrate | Qi Jie Peng, Chin Wei Tan, Jun-Liang Su, Sriskantharajah Thirunavukarasu, Arvind Sundarrajan +1 more | 2021-11-16 |
| 10930542 | Apparatus for handling various sized substrates | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Karrthik Parathithasan | 2021-02-23 |
| 10504762 | Bridging front opening unified pod (FOUP) | Karrthik Parathithasan, Sriskantharajah Thirunavukarasu, Eng Sheng Peh | 2019-12-10 |