Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11871667 | Methods and apparatus for warpage correction | Sriskantharajah Thirunavukarasu, Karrthik Parathithasan, Jun-Liang Su, Fang Jie Lim, Chin Wei Tan +1 more | 2024-01-09 |
| 11177146 | Methods and apparatus for processing a substrate | Qi Jie Peng, Chin Wei Tan, Jun-Liang Su, Fang Jie Lim, Sriskantharajah Thirunavukarasu +1 more | 2021-11-16 |