Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600492 | Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process | Sai Abhinand, Michael Lesley Sorensen, Karthik Elumalai, Cheng Sun, James S. Papanu +4 more | 2023-03-07 |
| 10446423 | Next generation warpage measurement system | Jun-Liang Su, Karthik Elumalai, Eng Sheng Peh, Sriskantharajah Thirunavukarasu | 2019-10-15 |
| 10325790 | Methods and apparatus for correcting substrate deformity | Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Jun-Liang Su, Shoju Vayyapron, Karthik Elumalai +1 more | 2019-06-18 |