| 11111583 |
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity |
Sriskantharajah Thirunavukarasu, Karthik Elumalai, Mingwei Zhu |
2021-09-07 |
| 10978334 |
Sealing structure for workpiece to substrate bonding in a processing chamber |
Chin Hock Toh, Tuck Foong Koh, Sriskantharajah Thirunavukarasu, Arvind Sundarrajan, Seshadri Ramaswami |
2021-04-13 |
| 10607870 |
Substrate carrier for active/passive bonding and de-bonding of a substrate |
Sriskantharajah Thirunavukarasu |
2020-03-31 |
| 10549324 |
Method and apparatus for backside cleaning of substrates |
Sriskantharajah Thirunavukarasu, Arvind Sundarrajan, Srinivas D. Nemani |
2020-02-04 |
| 9993853 |
Method and apparatus for backside cleaning of substrates |
Sriskantharajah Thirunavukarasu, Arvind Sundarrajan, Srinivas D. Nemani |
2018-06-12 |
| 9845533 |
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity |
Sriskantharajah Thirunavukarasu, Karthik Elumalai, Mingwei Zhu |
2017-12-19 |
| 9818624 |
Methods and apparatus for correcting substrate deformity |
Tuck Foong Koh, Sriskantharajah Thirunavukarasu, Karthik Elumalai, Eng Sheng Peh, Jun-Liang Su |
2017-11-14 |
| 9740111 |
Electrostatic carrier for handling substrates for processing |
Arvind Sundarrajan, Sriskantharajah Thirunavukarasu, Karthik Elumalai |
2017-08-22 |
