Multi-chamber substrate processing platform

Assignee

• Applied Materials

Inventors

• Ribhu Gautam (10 patents)
• Vibhu Jindal (65 patents)
• Sanjay Bhat (35 patents)
• Praveen Kumar Choragudi (2 patents)
• Vinodh Ramachandran (10 patents)
• Arun Rengaraj (1 patents)

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