Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869024 | Methods and apparatus for depositing a cobalt layer using a carousel batch deposition reactor | — | 2018-01-16 |
| 9431267 | Semiconductor device processing tools and methods for patterning substrates | Sushil Padiyar, Lakshmanan Karuppiah, Randhir P. S. Thakur | 2016-08-30 |
| 6593653 | Low leakage current silicon carbonitride prepared using methane, ammonia and silane for copper diffusion barrier, etchstop and passivation applications | Srinivasan Sundararajan | 2003-07-15 |
| 6444568 | Method of forming a copper diffusion barrier | Srinivasan Sundararajan | 2002-09-03 |