Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7745333 | Methods for depositing tungsten layers employing atomic layer deposition techniques | Ken Kaung Lai, Ravi Rajagopalan, Amit Khandelwal, Madhu Moorthy, Srinivas Gandikota +9 more | 2010-06-29 |
| 7695563 | Pulsed deposition process for tungsten nucleation | Xinliang Lu, Jong Hyun Yoo, Ken Kaung Lai, Alfred Mak, Robert Jackson +1 more | 2010-04-13 |
| 7405158 | Methods for depositing tungsten layers employing atomic layer deposition techniques | Ken Kaung Lai, Ravi Rajagopalan, Amit Khandelwal, Madhu Moorthy, Srinivas Gandikota +9 more | 2008-07-29 |
| 7211144 | Pulsed nucleation deposition of tungsten layers | Xinliang Lu, Jong Hyun Yoo, Ken Kaung Lai, Alfred Mak, Robert Jackson +1 more | 2007-05-01 |
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Salvador P. Umotoy, Son Trinh, Chien-Teh Kao +4 more | 2002-10-08 |
| 6251190 | Gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride | Alfred Mak, Kevin Lai, Cissy Leung, Steve Ghanayem, Thomas Wendling | 2001-06-26 |
| 6162715 | Method of forming gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride | Alfred Mak, Kevin Lai, Cissy Leung, Steve Ghanayem, Thomas Wendling | 2000-12-19 |