Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pulsed nucleation deposition of tungsten layers

Pulsed nucleation deposition of tungsten layers

US Patent 7211144 · Granted May 1, 2007

Estimated economic value: $22,949,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Rain guard system mountable to a vehicle2025
Nucleation-free gap fill ALD process2025
Vertical semiconductor device and fabrication method thereof2025
Vertical semiconductor device and fabrication method thereof2024
Methods for the treatment of workpieces2023
Laser ablation spectrometry apparatus2023
Chamber seasoning to improve etch uniformity by reducing chemistry2023
Apparatus for laser ablation analysis2023
Surface pretreatment process to improve quality of oxide films produced by remot2022
Ozone for selective hydrophilic surface treatment2022
Laser ablation analysis2022
Processing of workpieces with reactive species generated using alkyl halide2022