Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8624210 | Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates | Yen-Kun Wang, Shang-I Chou | 2014-01-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8624210 | Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates | Yen-Kun Wang, Shang-I Chou | 2014-01-07 |