Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7291286 | Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses | Enrico Magni, Michael J. Kelly, Robert C. Hefty | 2007-11-06 |
| 7226869 | Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing | Kenji Takeshita, Tsuyoshi Aso, Seiji Kawaguchi, Thomas McClard, Wan-Lin Chen +3 more | 2007-06-05 |