Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9536711 | Method and apparatus for DC voltage control on RF-powered electrode | Rajinder Dhindsa, Eric A. Hudson, Alexei Marakhtanov, Andreas Fischer | 2017-01-03 |
| 8691701 | Strip with reduced low-K dielectric damage | Bing Ji, Andrew D. Bailey, III, Stephen M. Sirard | 2014-04-08 |
| 8236188 | Method for low-K dielectric etch with reduced damage | Bing Ji, Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Stephen M. Sirard +6 more | 2012-08-07 |