Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181849 | Control of semiconductor manufacturing equipment in mixed reality environments | Rainer Unterguggenberger, Henry T. Chan, Chung-Ho Huang, Terrence George Bernier | 2024-12-31 |
| 8849585 | Methods for automatically characterizing a plasma | Douglas Keil, Jean-Paul Booth | 2014-09-30 |
| 8639381 | Arrangements for creating wafer movement control macros | — | 2014-01-28 |
| 7680559 | Wafer movement control macros | — | 2010-03-16 |