Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5893643 | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Rolf Guenther +3 more | 1999-04-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5893643 | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Rolf Guenther +3 more | 1999-04-13 |