Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558635 | Microwave gas decomposition reactor | Kambiz Farnaam, Rafik Grant Ayvazyan | 2003-05-06 |
| 6261525 | Process gas decomposition reactor | — | 2001-07-17 |
| 5893643 | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Brian Duda +3 more | 1999-04-13 |
| 5851926 | Method for etching transistor gates using a hardmask | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Rolf Guenther +1 more | 1998-12-22 |