Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384979 | Apparatus for the deposition of a conformal film on a substrate and methods therefor | Dae-Han Choi, Jisoo Kim, Eric A. Hudson, Sangheon Lee, S. M. Reza Sadjadi | 2016-07-05 |
| 8592318 | Pitch reduction using oxide spacer | Jisoo Kim, Jun Shinagawa, S. M. Reza Sadjadi | 2013-11-26 |
| 8357434 | Apparatus for the deposition of a conformal film on a substrate and methods therefor | Dae-Han Choi, Jisoo Kim, Eric A. Hudson, Sangheon Lee, S. M. Reza Sadjadi | 2013-01-22 |
| 7690966 | Method and apparatus for detecting planarization of metal films prior to clearing | Ramesh Gopalan, Sridharan Srivatsan, Katgenhalli Y. Ramanujam, Tom Ni | 2010-04-06 |
| 7476610 | Removable spacer | Ji Soo Kim, Daehan Choi, S. M. Reza Sadjadi, Michael Goss | 2009-01-13 |
| 7413988 | Method and apparatus for detecting planarization of metal films prior to clearing | Ramesh Gopalan, Sridharan Srivatsan, Katgenhalli Y. Ramanujam, Tom Ni | 2008-08-19 |
| 6617257 | Method of plasma etching organic antireflective coating | Tuqiang Ni, Weinan Jiang, Frank Y. Lin, Chris Lee, Dai N. Lee | 2003-09-09 |