Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7690966 | Method and apparatus for detecting planarization of metal films prior to clearing | Ramesh Gopalan, Katgenhalli Y. Ramanujam, Tom Ni, Conan Chiang | 2010-04-06 |
| 7413988 | Method and apparatus for detecting planarization of metal films prior to clearing | Ramesh Gopalan, Katgenhalli Y. Ramanujam, Tom Ni, Conan Chiang | 2008-08-19 |
| 7040952 | Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization process | Ramesh Gopalan, K. Y. Ramanujam | 2006-05-09 |
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, Ren Zhou, David Wei, Linda (Tong) Jiang +4 more | 2005-05-24 |
| 6475332 | Interlocking chemical mechanical polishing system | John M. Boyd, Katgenahalli Y. Ramanujam, Xuyen Pham | 2002-11-05 |