Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400888 | Data fusion of multiple sensors | Masaki Kitsunezuka, Chungjong Lee | 2025-08-26 |
| 12300477 | Autonomous operation of plasma processing tool | Toshihiro KITAO, Chungjong Lee, Masaki Kitsunezuka, Alok Ranjan | 2025-05-13 |
| 12112107 | Virtual metrology for wafer result prediction | Megan Wooley, Toshihiro KITAO, Carlos A. Fonseca | 2024-10-08 |
| 12032355 | Virtual metrology model based seasoning optimization | Brian D. Pfeifer, John Solis, Brian Gessler, Koichiro Nakamura, Yutaka Hirooka | 2024-07-09 |
| 11869756 | Virtual metrology enhanced plasma process optimization method | Toshihiro KITAO, Atsushi Suzuki, Megan Wooley, Alok Ranjan | 2024-01-09 |
| 11669079 | Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancements | Toshihiro KITAO, Hiroshi Nagahata, Chungjong Lee | 2023-06-06 |
| 10916411 | Sensor-to-sensor matching methods for chamber matching | — | 2021-02-09 |
| 10622219 | Methods and systems for chamber matching and monitoring | — | 2020-04-14 |
| 10438805 | Methods and systems for chamber matching and monitoring | — | 2019-10-08 |
| 9177756 | E-beam enhanced decoupled source for semiconductor processing | John Holland, Peter L. G. Ventzek, Harmeet Singh, Akira Koshiishi | 2015-11-03 |
| 9111728 | E-beam enhanced decoupled source for semiconductor processing | John Holland, Peter L. G. Ventzek, Harmeet Singh, Akira Koshiishi | 2015-08-18 |
| 8980046 | Semiconductor processing system with source for decoupled ion and radical control | Akira Koshiishi, Peter L. G. Ventzek, John Holland | 2015-03-17 |
| 8592318 | Pitch reduction using oxide spacer | Jisoo Kim, Conan Chiang, S. M. Reza Sadjadi | 2013-11-26 |
| 5319311 | Cable fault location method with discharge delay compensation using multiple pulses with different rates of voltage increase | Takao Kawashima, Masayoshi Arakane, Hitoshi Sugiyama, Tatenori Kano, Yasutaka Fujiwara +1 more | 1994-06-07 |