Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400888 | Data fusion of multiple sensors | Masaki Kitsunezuka, Jun Shinagawa | 2025-08-26 |
| 12300477 | Autonomous operation of plasma processing tool | Jun Shinagawa, Toshihiro KITAO, Masaki Kitsunezuka, Alok Ranjan | 2025-05-13 |
| 11669079 | Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancements | Jun Shinagawa, Toshihiro KITAO, Hiroshi Nagahata | 2023-06-06 |
| 9735027 | Method for etching organic film | Takayuki Katsunuma, Masanobu Honda | 2017-08-15 |