Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300477 | Autonomous operation of plasma processing tool | Jun Shinagawa, Chungjong Lee, Masaki Kitsunezuka, Alok Ranjan | 2025-05-13 |
| 12112107 | Virtual metrology for wafer result prediction | Jun Shinagawa, Megan Wooley, Carlos A. Fonseca | 2024-10-08 |
| 11869756 | Virtual metrology enhanced plasma process optimization method | Jun Shinagawa, Atsushi Suzuki, Megan Wooley, Alok Ranjan | 2024-01-09 |
| 11669079 | Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancements | Jun Shinagawa, Hiroshi Nagahata, Chungjong Lee | 2023-06-06 |