Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872322 | Multiple stage process for cleaning process chambers | Waiching Chow, Raney Williams, Thorsten Lill | 2005-03-29 |
| 6699399 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Weinan Jiang, Gerald Yin, Ming-Hsun Yang +5 more | 2004-03-02 |
| 6379575 | Treatment of etching chambers using activated cleaning gas | Gerald Yin, Xue-Yu Qian, Patrick Leahey, Jonathan D. Mohn, Waiching Chow +2 more | 2002-04-30 |
| 6352049 | Plasma assisted processing chamber with separate control of species density | Gerald Yin, Arnold Kolandenko, Hong Ching Shan, Peter Loewenhardt, Chii Guang Lee +9 more | 2002-03-05 |
| 6136211 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Weinan Jiang, Gerald Yin, Ming-Hsun Yang +5 more | 2000-10-24 |