Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735022 | Arrays of long nanostructures in semiconductor materials and methods thereof | Mingqiang Yi, Matthew L. Scullin, Gabriel A. Matus, Dawn L. Hilken, Sylvain Muckenhirn | 2017-08-15 |
| 9514931 | Low thermal conductivity matrices with embedded nanostructures and methods thereof | Mingqiang Yi, Gabriel A. Matus, Matthew L. Scullin, Sylvain Muckenhirn | 2016-12-06 |
| 9240328 | Arrays of long nanostructures in semiconductor materials and methods thereof | Mingqiang Yi, Matthew L. Scullin, Gabriel A. Matus, Dawn L. Hilken, Sylvain Muckenhirn | 2016-01-19 |
| 8736011 | Low thermal conductivity matrices with embedded nanostructures and methods thereof | Mingqiang Yi, Gabriel A. Matus, Matthew L. Scullin, Sylvain Muckenhirn | 2014-05-27 |
| 7884021 | Planarization of a layer over a cavity | Shaoher X. Pan | 2011-02-08 |
| 7821010 | Low temperature fabrication of conductive micro structures | Shaoher X. Pan | 2010-10-26 |
| 7428092 | Fast-response micro-mechanical devices | Chun-Teh Kao, Hung-Kwei Hu, Shaoher X. Pan | 2008-09-23 |
| 7416908 | Method for fabricating a micro structure | Shaoher X. Pan, Hung-Kwei Hu | 2008-08-26 |
| 6471822 | Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma | Gerald Yin, Peter Loewenhardt, Arnold Kholodenko, Hong Chin Shan, Dan Katz | 2002-10-29 |
| 6352049 | Plasma assisted processing chamber with separate control of species density | Gerald Yin, Arnold Kolandenko, Hong Ching Shan, Peter Loewenhardt, Yan Ye +9 more | 2002-03-05 |
| 6189484 | Plasma reactor having a helicon wave high density plasma source | Gerald Yin, Arnold Kholodenko, Peter Loewenhardt, Hongching Shan, Diana Xiaobing Ma +1 more | 2001-02-20 |