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Fast-response micro-mechanical devices |
Chii Guang Lee, Chun-Teh Kao, Shaoher X. Pan |
2008-09-23 |
| 7416908 |
Method for fabricating a micro structure |
Chii Guang Lee, Shaoher X. Pan |
2008-08-26 |
| 6784110 |
Method of etching shaped features on a substrate |
Jianping Wen, Meihua Shen |
2004-08-31 |
| 6617216 |
Quasi-damascene gate, self-aligned source/drain methods for fabricating devices |
— |
2003-09-09 |
| 5663091 |
Method for fabricating an electrically programmable antifuse |
Yeouchung Yen, Shih-Oh Chen |
1997-09-02 |
| 5550404 |
Electrically programmable antifuse having stair aperture |
Yeouchung Yen, Shih-Oh Chen |
1996-08-27 |
| 5223084 |
Simultaneous dielectric planarization and contact hole etching |
Warren M. Uesato, Kwang-Leei K. Young, Paul K. Aum |
1993-06-29 |
| 5096802 |
Holes and spaces shrinkage |
— |
1992-03-17 |
