Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872322 | Multiple stage process for cleaning process chambers | Raney Williams, Thorsten Lill, Arthur Y. Chen | 2005-03-29 |
| 6379575 | Treatment of etching chambers using activated cleaning gas | Gerald Yin, Xue-Yu Qian, Patrick Leahey, Jonathan D. Mohn, Arthur Y. Chen +2 more | 2002-04-30 |