Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872322 | Multiple stage process for cleaning process chambers | Waiching Chow, Thorsten Lill, Arthur Y. Chen | 2005-03-29 |
| 6583065 | Sidewall polymer forming gas additives for etching processes | Jeffrey D. Chinn, Jitske Trevor, Thorsten Lill, Padmapani Nallan, Tamas Varga +1 more | 2003-06-24 |