Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824813 | Substrate monitoring method and apparatus | Thorsten Lill, Michael N. Grimbergen, Wei-Nan Jiang, Jeffrey D. Chinn | 2004-11-30 |
| 6583065 | Sidewall polymer forming gas additives for etching processes | Raney Williams, Jeffrey D. Chinn, Thorsten Lill, Padmapani Nallan, Tamas Varga +1 more | 2003-06-24 |
| 6402974 | Method for etching polysilicon to have a smooth surface | Shashank Deshmukh, Jeff Chinn | 2002-06-11 |
| 5786276 | Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of CH3F or CH2F2 and CF4 and O2 | Cynthia B. Brooks, Walter R. Merry, Ajey M. Joshi, Gladys D. Quinones | 1998-07-28 |