Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8221828 | Surface coating process | W. Robert Ashurst, Adam Anderson | 2012-07-17 |
| 7968187 | Surface coating | W. Robert Ashurst, Adam Anderson | 2011-06-28 |
| 6827869 | Method of micromachining a multi-part cavity | Dragan Podlesnik, Thorsten Lill, Shaoher X. Pan, Anisul Khan, Maocheng Li +1 more | 2004-12-07 |
| 6613682 | Method for in situ removal of a dielectric antireflective coating during a gate etch process | Mohit Jain, Thorsten Lill | 2003-09-02 |
| 6491835 | Metal mask etching of silicon | Ajay Kumar, Anisul Khan, Wei Liu, John Chao | 2002-12-10 |
| 6402974 | Method for etching polysilicon to have a smooth surface | Jitske Trevor, Shashank Deshmukh | 2002-06-11 |
| 6235643 | Method for etching a trench having rounded top and bottom corners in a silicon substrate | David Mui, Dragan Podlesnik, Wei Liu, Gene Lee, Nam Hun Kim | 2001-05-22 |
| 6069086 | Non-HBr shallow trench isolation etch process | Padmapani Nallan, Ganming Zhao, Thalia Kong | 2000-05-30 |