Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776846 | Integrated processing system having multiple reactors connected to a central chamber | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 2004-08-17 |
| 6413320 | Integrated processing system having multiple reactors connected to a central chamber | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 2002-07-02 |
| 6409149 | Dual pendulum valve assembly with valve seat cover | — | 2002-06-25 |
| 6328051 | Dual pendulum valve assembly | — | 2001-12-11 |
| 6214119 | Vacuum substrate processing system having multiple processing chambers and a central load/unload chamber | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 2001-04-10 |
| 6186177 | Integrated gas delivery system | — | 2001-02-13 |
| 6161576 | Integrated turbo pump and control valve system | Richard W. Olmsted | 2000-12-19 |
| 6103055 | System for processing substrates | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 2000-08-15 |
| 5344542 | Multiple-processing and contamination-free plasma etching system | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1994-09-06 |
| 5308431 | System providing multiple processing of substrates | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1994-05-03 |
| 5248371 | Hollow-anode glow discharge apparatus | Martin Kent | 1993-09-28 |
| 5102495 | Method providing multiple-processing of substrates | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1992-04-07 |
| 5076205 | Modular vapor processor system | E. John Vowles, Joseph D. Napoli | 1991-12-31 |
| 5013385 | Quad processor | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1991-05-07 |
| 4715921 | Quad processor | E. John Vowles, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1987-12-29 |
| D275032 | Plasma cassette etcher | Arthur W. Zafiropoulo | 1984-08-07 |
| 4381965 | Multi-planar electrode plasma etching | Arthur W. Zafiropoulo | 1983-05-03 |