Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10351950 | Plasma enhanced ALD system | Robert C. Kane, Michael J. Sershen | 2019-07-16 |
| 9318319 | Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generation | Arthur W. Zafiropoulo | 2016-04-19 |