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Home › Control technique for microlithography lasers

Control technique for microlithography lasers

US Patent 6392743 · Granted May 21, 2002

Estimated economic value: $21,407,000 ⓘ

Assignee

Cymer

Inventors

Paolo Zambon (10 patents)
Gamaralalage G. Padmabandu (10 patents)
Tom A. Watson (34 patents)
Palash P. Das (71 patents)

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