| 10426020 |
Droplet generator steering system |
Peter Michael Baumgart, Abhiram Govindaraju, Chirag Rajyaguru |
2019-09-24 |
|
| 9544983 |
Apparatus for and method of supplying target material |
Chirag Rajyaguru, Tetsuya Ishikawa, Peter Michael Baumgart |
2017-01-10 |
$5,681,000 |
| 9147995 |
Rapidly tunable laser source assembly with long stroke grating mover |
Michael Pushkarsky, Satino Marrone, John Craig, Alexander Dromaretsky |
2015-09-29 |
|
| RE45249 |
System method and apparatus for selecting and controlling light source bandwidth |
Efrain Figueroa, William N. Partlo |
2014-11-18 |
|
| 8144739 |
System method and apparatus for selecting and controlling light source bandwidth |
Efrain Figueroa, William N. Partlo |
2012-03-27 |
$5,929,000 |
| 7382815 |
Laser spectral engineering for lithographic process |
Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more |
2008-06-03 |
$9,230,000 |
| 7346093 |
DUV light source optical element improvements |
Richard L. Sandstrom, Joshua Brown, Raymond F. Cybulski, John Dunlop, James K. Howey +6 more |
2008-03-18 |
$6,813,000 |
| 7298770 |
Laser spectral engineering for lithographic process |
Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more |
2007-11-20 |
$9,079,000 |
| 7217940 |
Collector for EUV light source |
William N. Partlo, Gerry Blumenstock, Norbert Bowering, Alexander I. Ershov, Igor V. Fomenkov +1 more |
2007-05-15 |
$3,882,000 |
| 7139301 |
Laser spectral engineering for lithographic process |
Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom +1 more |
2006-11-21 |
$16,155,000 |
| 7087914 |
High repetition rate laser produced plasma EUV light source |
Robert P. Akins, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, Robert N. Jacques +2 more |
2006-08-08 |
$7,262,000 |
| 7079556 |
Bandwidth control technique for a laser |
Igor V. Fomenkov, Armen Kroyan, Jesse Buck, Palash P. Das, Richard L. Sandstrom +2 more |
2006-07-18 |
$7,512,000 |
| 6904073 |
High power deep ultraviolet laser with long life optics |
Thomas A. Yager, William N. Partio, Richard L. Sandstrom, Xiaojiang Pan, John T. Melchior +11 more |
2005-06-07 |
$10,280,000 |
| 6882674 |
Four KHz gas discharge laser system |
Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more |
2005-04-19 |
$9,338,000 |
| 6853653 |
Laser spectral engineering for lithographic process |
Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more |
2005-02-08 |
$9,873,000 |
| 6757316 |
Four KHz gas discharge laser |
Peter Clarke Newman, Thomas Patrick Duffey, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher +14 more |
2004-06-29 |
$12,694,000 |
| 6721340 |
Bandwidth control technique for a laser |
Igor V. Fomenkov, Armen Kroyan, Jesse Buck, Palash P. Das, Richard L. Sandstrom +2 more |
2004-04-13 |
$14,050,000 |
| 6671294 |
Laser spectral engineering for lithographic process |
Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom +1 more |
2003-12-30 |
$17,565,000 |
| 6650666 |
Laser wavelength control unit with piezoelectric driver |
Ronald Spangler, Robert N. Jacques, John Allen Rule, Frederick Palenschat, Igor V. Fomenkov +2 more |
2003-11-18 |
$17,157,000 |
| 6532247 |
Laser wavelength control unit with piezoelectric driver |
Ronald Spangler, Robert N. Jacques, George J. Everage, Stuart L. Anderson, Frederick Palenschat +4 more |
2003-03-11 |
$12,639,000 |
| 6529531 |
Fast wavelength correction technique for a laser |
George J. Everage, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, Frederick Erie |
2003-03-04 |
$6,861,000 |
| 6496528 |
Line narrowing unit with flexural grating mount |
Clay C. Titus, William G. Hulburd, Raymond F. Cybulski, Michael Lysik |
2002-12-17 |
$17,303,000 |
| 6192064 |
Narrow band laser with fine wavelength control |
Christopher A. Marchi, Frederick Erie, Jesse Buck, Alexander I. Ershov, Palash P. Das +1 more |
2001-02-20 |
$13,589,000 |
