| 12072242 |
Hyperspectral sensing system and processing methods for hyperspectral data |
Nicholas Tufillaro, Omar Zurita |
2024-08-27 |
|
| 11650190 |
Hyperspectral sensing system and methods |
Nicholas Tufillaro, Philipp Michael Maximilan GRÖTSCH, Omar Zurita |
2023-05-16 |
|
| 11333649 |
Hyperspectral sensing system |
— |
2022-05-17 |
|
| 11221322 |
Hyperspectral sensing system |
— |
2022-01-11 |
|
| 11073423 |
Hyperspectral sensing system and processing methods for hyperspectral data |
Nicholas Tufillaro, Omar Zurita |
2021-07-27 |
|
| 10794888 |
Hyperspectral sensing system |
— |
2020-10-06 |
|
| 10036960 |
Wafer-based light source parameter control |
Omar Zurita, Gregory Allen Rechtsteiner, Paolo Alagna, Simon Hsieh, Jason Lee +2 more |
2018-07-31 |
|
| 9715180 |
Wafer-based light source parameter control |
Omar Zurita, Gregory Allen Rechtsteiner, Paolo Alagna, Simon Hsieh, Jason Lee +2 more |
2017-07-25 |
|
| 9709897 |
Polarization control of pulsed light beam |
Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Robert Jay Rafac |
2017-07-18 |
|
| 8520186 |
Active spectral control of optical source |
Nakgeuon Seong, Nigel R. Farrar, Robert Jay Rafac, Joseph J. Bendik |
2013-08-27 |
|
| 8170078 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt +1 more |
2012-05-01 |
$11,318,000 |
| 7999915 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt |
2011-08-16 |
$4,662,000 |
| 7885309 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt +1 more |
2011-02-08 |
$9,700,000 |
| 7741012 |
Method for removal of immersion lithography medium in immersion lithography processes |
Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Harry J. Levinson +3 more |
2010-06-22 |
$10,015,000 |
| 7382815 |
Laser spectral engineering for lithographic process |
Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more |
2008-06-03 |
$9,230,000 |
| 7298770 |
Laser spectral engineering for lithographic process |
Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more |
2007-11-20 |
$9,079,000 |
| 7139301 |
Laser spectral engineering for lithographic process |
Armen Kroyan, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, John M. Algots +1 more |
2006-11-21 |
$16,155,000 |
| 7087907 |
Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy |
Bruno M. LaFontaine |
2006-08-08 |
$20,246,000 |
| 7081956 |
Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging system |
Bruno M. LaFontaine |
2006-07-25 |
$22,626,000 |
| 7014966 |
Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems |
Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Harry J. Levinson +3 more |
2006-03-21 |
$13,217,000 |
| 6984475 |
Extreme ultraviolet (EUV) lithography masks |
Harry J. Levinson, Bruno M. LaFontaine, Adam R. Pawloski |
2006-01-10 |
$17,911,000 |
| 6977717 |
Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system |
Bruno M. LaFontaine, Jongwook Kye |
2005-12-20 |
$11,866,000 |
| 6853653 |
Laser spectral engineering for lithographic process |
Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more |
2005-02-08 |
$9,873,000 |
| 6829040 |
Lithography contrast enhancement technique by varying focus with wavelength modulation |
Jongwook Kye, Christopher F. Lyons, Ramkumar Subramanian |
2004-12-07 |
$8,137,000 |
| 6671294 |
Laser spectral engineering for lithographic process |
Armen Kroyan, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, John M. Algots +1 more |
2003-12-30 |
$17,565,000 |
