Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072242 | Hyperspectral sensing system and processing methods for hyperspectral data | Nicholas Tufillaro, Omar Zurita | 2024-08-27 |
| 11650190 | Hyperspectral sensing system and methods | Nicholas Tufillaro, Philipp Michael Maximilan GRÖTSCH, Omar Zurita | 2023-05-16 |
| 11333649 | Hyperspectral sensing system | — | 2022-05-17 |
| 11221322 | Hyperspectral sensing system | — | 2022-01-11 |
| 11073423 | Hyperspectral sensing system and processing methods for hyperspectral data | Nicholas Tufillaro, Omar Zurita | 2021-07-27 |
| 10794888 | Hyperspectral sensing system | — | 2020-10-06 |
| 10036960 | Wafer-based light source parameter control | Omar Zurita, Gregory Allen Rechtsteiner, Paolo Alagna, Simon Hsieh, Jason Lee +2 more | 2018-07-31 |
| 9715180 | Wafer-based light source parameter control | Omar Zurita, Gregory Allen Rechtsteiner, Paolo Alagna, Simon Hsieh, Jason Lee +2 more | 2017-07-25 |
| 9709897 | Polarization control of pulsed light beam | Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Robert Jay Rafac | 2017-07-18 |
| 8520186 | Active spectral control of optical source | Nakgeuon Seong, Nigel R. Farrar, Robert Jay Rafac, Joseph J. Bendik | 2013-08-27 |
| 8170078 | Laser system | Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt +1 more | 2012-05-01 |
| 7999915 | Laser system | Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt | 2011-08-16 |
| 7885309 | Laser system | Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt +1 more | 2011-02-08 |
| 7741012 | Method for removal of immersion lithography medium in immersion lithography processes | Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Harry J. Levinson +3 more | 2010-06-22 |
| 7382815 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more | 2008-06-03 |
| 7298770 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more | 2007-11-20 |
| 7139301 | Laser spectral engineering for lithographic process | Armen Kroyan, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, John M. Algots +1 more | 2006-11-21 |
| 7087907 | Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy | Bruno M. LaFontaine | 2006-08-08 |
| 7081956 | Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging system | Bruno M. LaFontaine | 2006-07-25 |
| 7014966 | Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems | Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Harry J. Levinson +3 more | 2006-03-21 |
| 6984475 | Extreme ultraviolet (EUV) lithography masks | Harry J. Levinson, Bruno M. LaFontaine, Adam R. Pawloski | 2006-01-10 |
| 6977717 | Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system | Bruno M. LaFontaine, Jongwook Kye | 2005-12-20 |
| 6853653 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more | 2005-02-08 |
| 6829040 | Lithography contrast enhancement technique by varying focus with wavelength modulation | Jongwook Kye, Christopher F. Lyons, Ramkumar Subramanian | 2004-12-07 |
| 6671294 | Laser spectral engineering for lithographic process | Armen Kroyan, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, John M. Algots +1 more | 2003-12-30 |