| 8748800 |
Charge storage device for detecting alpha particles |
Timothy Z. Hossain, Patrick Mark Clopton, Christopher Foster, Clayton Fulwood, Greg Alan Goodwin +1 more |
2014-06-10 |
$2,106,000 |
| 8436289 |
System and method for detecting particles with a semiconductor device |
Timothy Z. Hossain, Patrick Mark Clopton, Christopher Foster, Clayton Fullwood, Greg Alan Goodwin +1 more |
2013-05-07 |
$2,977,000 |
| 7608855 |
Polymer dielectrics for memory element array interconnect |
— |
2009-10-27 |
|
| 7427457 |
Methods for designing grating structures for use in situ scatterometry to detect photoresist defects |
Marina V. Plat, Calvin T. Gabriel, Anna M. Minvielle |
2008-09-23 |
$38,156,000 |
| 7268066 |
Method for semiconductor gate line dimension reduction |
Douglas J. Bonser, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Srikanteswara Dakshina-Murthy +1 more |
2007-09-11 |
$10,117,000 |
| 7169711 |
Method of using carbon spacers for critical dimension (CD) reduction |
Philip A. Fisher, Richard J. Huang, Cyrus E. Tabery |
2007-01-30 |
$15,947,000 |
| 7125652 |
Immersion lithographic process using a conforming immersion medium |
Carl P. Babcock, Jongwook Kye |
2006-10-24 |
$12,982,000 |
| 7122455 |
Patterning with rigid organic under-layer |
Marina V. Plat, Srikanteswara Dakshina-Murthy, Scott A. Bell, Cyrus E. Tabery |
2006-10-17 |
$21,769,000 |
| 7115440 |
SO2 treatment of oxidized CuO for copper sulfide formation of memory element growth |
Ramkumar Subramanian, Sergey Lopatin, James J. Xie, Angela T. Hui |
2006-10-03 |
$25,981,000 |
| 7112489 |
Negative resist or dry develop process for forming middle of line implant layer |
Anna M. Minvielle, Marina V. Plat |
2006-09-26 |
$43,067,000 |
| 7056804 |
Shallow trench isolation polish stop layer for reduced topography |
Ramkumar Subramanian |
2006-06-06 |
$17,745,000 |
| 7052921 |
System and method using in situ scatterometry to detect photoresist pattern integrity during the photolithography process |
Marina V. Plat, Bhanwar Singh, Calvin T. Gabriel, Scott A. Bell, Ramkumar Subramanian +1 more |
2006-05-30 |
$15,789,000 |
| 7018922 |
Patterning for elongated VSS contact flash memory |
Hung-Eil Kim, Anna M. Minvielle, Marina V. Plat, Ramkumar Subramanian |
2006-03-28 |
$11,294,000 |
| 7015504 |
Sidewall formation for high density polymer memory element array |
Mark S. Chang, Sergey Lopatin, Ramkumar Subramanian, Patrick K. Cheung, Minh Van Ngo +1 more |
2006-03-21 |
$13,217,000 |
| 7011762 |
Metal bridging monitor for etch and CMP endpoint detection |
Ramkumar Subramanian, Steven C. Avanzino |
2006-03-14 |
$17,128,000 |
| 7008832 |
Damascene process for a T-shaped gate electrode |
Ramkumar Subramanian, Marina V. Plat, Bhanwar Singh |
2006-03-07 |
$15,826,000 |
| 6989332 |
Ion implantation to modulate amorphous carbon stress |
Scott A. Bell, Srikanteswara Dakshina-Murthy |
2006-01-24 |
$11,964,000 |
| 6982043 |
Scatterometry with grating to observe resist removal rate during etch |
Ramkumar Subramanian, Bharath Rangarajan, Catherine B. Labelle, Bhanwar Singh |
2006-01-03 |
$22,329,000 |
| 6972576 |
Electrical critical dimension measurement and defect detection for reticle fabrication |
Khoi A. Phan, Cyrus E. Tabery, Bhanwar Singh |
2005-12-06 |
$7,747,000 |
| 6955939 |
Memory element formation with photosensitive polymer dielectric |
Terence Tong, Patrick K. Cheung |
2005-10-18 |
$5,936,000 |
| 6906777 |
Pellicle for a lithographic lens |
Jongwook Kye, Carl P. Babcock |
2005-06-14 |
$5,811,000 |
| 6900124 |
Patterning for elliptical Vss contact on flash memory |
Hung-Eil Kim, Anna M. Minvielle, Marina V. Plat, Ramkumar Subramanian |
2005-05-31 |
$6,268,000 |
| 6878961 |
Photosensitive polymeric memory elements |
Ramkumar Subramanian, Mark S. Chang |
2005-04-12 |
$6,806,000 |
| 6869888 |
E-beam flood exposure of spin-on material to eliminate voids in vias |
Marina V. Plat, Ramkumar Subramanian, Bhanwar Singh |
2005-03-22 |
$6,839,000 |
| 6869734 |
EUV reflective mask having a carbon film and a method of making such a mask |
Cyrus E. Tabery, Richard J. Huang |
2005-03-22 |
$6,839,000 |
