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Damascene metal-insulator-metal (MIM) device with improved scaleability |
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Damascene metal-insulator-metal (MIM) device |
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Method for decreasing sheet resistivity variations of an interconnect metal layer |
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2008-04-15 |
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Slurry-less polishing for removal of excess interconnect material during fabrication of a silicon integrated circuit |
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2006-11-28 |
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SO2 treatment of oxidized CuO for copper sulfide formation of memory element growth |
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Post CMP precursor treatment |
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2006-01-03 |
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Organic memory cell formation on Ag substrate |
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2005-08-09 |
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Silicon containing material for patterning polymeric memory element |
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