| 8552560 |
Alternate pad structures/passivation inegration schemes to reduce or eliminate IMC cracking in post wire bonded dies during Cu/Low-K BEOL processing |
Hemanshu Bhatt, Dilip Vijay, Sey-Shing Sun, Hong Ying, Chiyi Kao |
2013-10-08 |
| 8076779 |
Reduction of macro level stresses in copper/low-K wafers |
Sey-Shing Sun, Dilip Vijay, Hemanshu Bhatt, Hong Ying, Chiyi Kao +1 more |
2011-12-13 |
| 7531442 |
Eliminate IMC cracking in post wirebonded dies: macro level stress reduction by modifying dielectric/metal film stack in be layers during Cu/Low-K processing |
Dilip Vijay, Hemanshu Bhatt, Sey-Shing Sun, Hong Ying, Chiyi Kao +3 more |
2009-05-12 |
| 7205673 |
Reduce or eliminate IMC cracking in post wire bonded dies by doping aluminum used in bond pads during Cu/Low-k BEOL processing |
Dilip Vijay, Hemanshu Bhatt, Sey-Shing Sun, Hong Ying, Chiyi Kao |
2007-04-17 |
| 6951808 |
Metal planarization system |
Samuel V. Dunton, Ronald J. Nagahara |
2005-10-04 |
| 6838379 |
PROCESS FOR REDUCING IMPURITY LEVELS, STRESS, AND RESISTIVITY, AND INCREASING GRAIN SIZE OF COPPER FILLER IN TRENCHES AND VIAS OF INTEGRATED CIRCUIT STRUCTURES TO ENHANCE ELECTRICAL PERFORMANCE OF COPPER FILLER |
Byung Sung Kwak, William K. Barth |
2005-01-04 |
| 6752916 |
Electrochemical planarization end point detection |
Yan Fang, Ronald J. Nagahara |
2004-06-22 |
| 6713394 |
Process for planarization of integrated circuit structure which inhibits cracking of low dielectric constant dielectric material adjacent underlying raised structures |
Ronald J. Nagahara, Dawn M. Lee |
2004-03-30 |
| 6607967 |
Process for forming planarized isolation trench in integrated circuit structure on semiconductor substrate |
Dawn M. Lee, Ronald J. Nagahara |
2003-08-19 |
| 6586326 |
Metal planarization system |
Samuel V. Dunton, Ronald J. Nagahara |
2003-07-01 |
| 6555475 |
Arrangement and method for polishing a surface of a semiconductor wafer |
Ron Nagahara |
2003-04-29 |
| 6503828 |
Process for selective polishing of metal-filled trenches of integrated circuit structures |
Ronald J. Nagahara, James J. Xie, Akihisa Ueno |
2003-01-07 |
| 6489242 |
Process for planarization of integrated circuit structure which inhibits cracking of low dielectric constant dielectric material adjacent underlying raised structures |
Ronald J. Nagahara, Dawn M. Lee |
2002-12-03 |
| 6439981 |
Arrangement and method for polishing a surface of a semiconductor wafer |
Ron Nagahara |
2002-08-27 |
| 6424019 |
Shallow trench isolation chemical-mechanical polishing process |
Shouli Steve Hsia, Yanhua Wang |
2002-07-23 |
| 6417093 |
Process for planarization of metal-filled trenches of integrated circuit structures by forming a layer of planarizable material over the metal layer prior to planarizing |
James J. Xie, Ronald J. Nagahara, Akihisa Ueno |
2002-07-09 |
| 6391768 |
Process for CMP removal of excess trench or via filler metal which inhibits formation of concave regions on oxide surface of integrated circuit structure |
Dawn M. Lee, Weidan Li, Ming-Yi Lee |
2002-05-21 |
| 6372524 |
Method for CMP endpoint detection |
James J. Xie, Ronald J. Nagahara |
2002-04-16 |
| 6060370 |
Method for shallow trench isolations with chemical-mechanical polishing |
Shouli Steve Hsia, Yanhua Wang |
2000-05-09 |