Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8722518 | Methods for protecting patterned features during trench etch | Steven J. Radigan, Usha Raghuram, Michael Konevecki | 2014-05-13 |
| 8008187 | Method for reducing dielectric overetch using a dielectric etch stop at a planar surface | Christopher J. Petti, Usha Raghuram | 2011-08-30 |
| 7790607 | Method for reducing dielectric overetch using a dielectric etch stop at a planar surface | Usha Raghuram, Christopher J. Petti | 2010-09-07 |
| 7575984 | Conductive hard mask to protect patterned features during trench etch | Steven J. Radigan, Usha Raghuram, Michael Konevecki | 2009-08-18 |
| 7422985 | Method for reducing dielectric overetch using a dielectric etch stop at a planar surface | Christopher J. Petti, Usha Raghuram | 2008-09-09 |
| 7307013 | Nonselective unpatterned etchback to expose buried patterned features | Usha Raghuram, Michael Konevecki | 2007-12-11 |
| 7300876 | Method for cleaning slurry particles from a surface polished by chemical mechanical polishing | Steven J. Radigan | 2007-11-27 |
| 7291562 | Method to form topography in a deposited layer above a substrate | Yung-Tin Chen | 2007-11-06 |
| 7238607 | Method to minimize formation of recess at surface planarized by chemical mechanical planarization | S. Brad Herner | 2007-07-03 |
| 6951808 | Metal planarization system | Jayanthi Pallinti, Ronald J. Nagahara | 2005-10-04 |
| 6727107 | Method of testing the processing of a semiconductor wafer on a CMP apparatus | Ron Nagahara, Pepito Galvez | 2004-04-27 |
| 6649451 | Structure and method for wafer comprising dielectric and semiconductor | Michael A. Vyvoda, James M. Cleeves, Calvin K. Li | 2003-11-18 |
| 6586326 | Metal planarization system | Jayanthi Pallinti, Ronald J. Nagahara | 2003-07-01 |
| 6565416 | Laser interferometry endpoint detection with windowless polishing pad for chemical mechanical polishing process | Yizhi Xiong | 2003-05-20 |
| 6319836 | Planarization system | Ming-Yi Lee | 2001-11-20 |
| 6224460 | Laser interferometry endpoint detection with windowless polishing pad for chemical mechanical polishing process | Yizhi Xiong | 2001-05-01 |
| 6196900 | Ultrasonic transducer slurry dispenser | Liming Zhang, Milind Weling | 2001-03-06 |
| 6103634 | Removal of inorganic anti-reflective coating using fluorine etch process | — | 2000-08-15 |
| 6028013 | Moisture repellant integrated circuit dielectric material combination | Rao Annapragada, Milind Weling, Subhas Bothra | 2000-02-22 |
| 5405488 | System and method for plasma etching endpoint detection | Dimitrios Dimitrelis, Calvin T. Gabriel | 1995-04-11 |