Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727107 | Method of testing the processing of a semiconductor wafer on a CMP apparatus | Samuel V. Dunton, Pepito Galvez | 2004-04-27 |
| 6555475 | Arrangement and method for polishing a surface of a semiconductor wafer | Jayanthi Pallinti | 2003-04-29 |
| 6439981 | Arrangement and method for polishing a surface of a semiconductor wafer | Jayanthi Pallinti | 2002-08-27 |
| 6004193 | Dual purpose retaining ring and polishing pad conditioner | Dawn M. Lee | 1999-12-21 |
| 5865666 | Apparatus and method for polish removing a precise amount of material from a wafer | — | 1999-02-02 |
| 5816900 | Apparatus for polishing a substrate at radially varying polish rates | Dawn M. Lee | 1998-10-06 |