| 8547521 |
Systems and methods that control liquid temperature in immersion lithography to maintain temperature gradient to reduce turbulence |
Srikanteswara Dakshina-Murthy, Ramkumar Subramanian |
2013-10-01 |
$6,159,000 |
| 8124300 |
Method of lithographic mask correction using localized transmission adjustment |
Luigi Capodieci |
2012-02-28 |
$5,561,000 |
| 8028531 |
Mitigating heat in an integrated circuit |
Khoi A. Phan, Bharath Rangarajan |
2011-10-04 |
$5,077,000 |
| 8007631 |
System and method for imprint lithography to facilitate dual damascene integration with two imprint acts |
Srikanteswara Dakshina-Murthy, Ramkumar Subramanian |
2011-08-30 |
$4,140,000 |
| 7875851 |
Advanced process control framework using two-dimensional image analysis |
Chris Haidinyak, Jason P. Cain |
2011-01-25 |
$8,589,000 |
| 7799514 |
Surface treatment with an acidic composition to prevent substrate and environmental contamination |
Ramkumar Subramanian, Gilles Amblard |
2010-09-21 |
$7,003,000 |
| 7749662 |
Process margin using discrete assist features |
Itty Matthew |
2010-07-06 |
$11,658,000 |
| 7709373 |
System and method for imprint lithography to facilitate dual damascene integration in a single imprint act |
Srikanteswara Dakshina-Murthy, Khoi A. Phan |
2010-05-04 |
$39,204,000 |
| 7604903 |
Mask having sidewall absorbers to enable the printing of finer features in nanoprint lithography (1XMASK) |
Srikanteswara Dakshina-Murthy, Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian |
2009-10-20 |
$11,080,000 |
| 7468296 |
Thin film germanium diode with low reverse breakdown |
Ercan Adem, Matthew S. Buynoski, Robert J. Chiu, Bryan K. Choo, Calvin T. Gabriel +5 more |
2008-12-23 |
|
| 7460922 |
Scanner optimization for reduced across-chip performance variation through non-contact electrical metrology |
Jason P. Cain, Harish K. Bolla, Iraj Emami |
2008-12-02 |
$4,041,000 |
| 7449348 |
Feedback control of imprint mask feature profile using scatterometry and spacer etchback |
Srikanteswara Dakshina-Murthy, Ramkumar Subramanian, Khoi A. Phan |
2008-11-11 |
$5,286,000 |
| 7405032 |
Combination of non-lithographic shrink techniques and trim process for gate formation and line-edge roughness reduction |
Gilles Amblard, Srikanteswara Dakshina-Murthy |
2008-07-29 |
$14,172,000 |
| 7386162 |
Post fabrication CD modification on imprint lithography mask |
Srikanteswara Dakshina-Murthy, Ramkumar Subramanian |
2008-06-10 |
$9,127,000 |
| 7384569 |
Imprint lithography mask trimming for imprint mask using etch |
Srikanteswara Dakshina-Murthy, Ramkumar Subramanian |
2008-06-10 |
$9,127,000 |
| 7381278 |
Using supercritical fluids to clean lenses and monitor defects |
Ramkumar Subramanian, Khoi A. Phan, Srikanteswara Dakshina-Murthy |
2008-06-03 |
$5,507,000 |
| 7376259 |
Topography compensation of imprint lithography patterning |
Srikanteswara Dakshina-Murthy, Ramkumar Subramanian |
2008-05-20 |
$11,194,000 |
| 7373215 |
Transistor gate shape metrology using multiple data sources |
Jason P. Cain, Iraj Emami |
2008-05-13 |
$15,194,000 |
| 7334202 |
Optimizing critical dimension uniformity utilizing a resist bake plate simulator |
Qiaolin Zhang, Iraj Emami, Joyce S. Oey Hewett, Luigi Capodiece |
2008-02-19 |
$10,551,000 |
| 7310155 |
Extraction of tool independent line-edge-roughness (LER) measurements using in-line programmed LER and reliability structures |
Luigi Capodieci, Amit P. Marathe, Ramkumar Subramanian |
2007-12-18 |
$12,803,000 |
| 7309659 |
Silicon-containing resist to pattern organic low k-dielectrics |
Ramkumar Subramanian, Calvin T. Gabriel |
2007-12-18 |
$12,803,000 |
| 7305645 |
Method for manufacturing place & route based on 2-D forbidden patterns |
Luigi Capodieci, Ramkumar Subramanian |
2007-12-04 |
|
| 7295288 |
Systems and methods of imprint lithography with adjustable mask |
Ramkumar Subramanian, Khoi A. Phan |
2007-11-13 |
$5,321,000 |
| 7289193 |
Frame structure for turbulence control in immersion lithography |
Ramkumar Subramanian, Khoi A. Phan |
2007-10-30 |
$11,707,000 |
| 7262138 |
Organic BARC with adjustable etch rate |
Ramkumar Subramanian, Gilles Amblard |
2007-08-28 |
$7,142,000 |
