Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7334202 | Optimizing critical dimension uniformity utilizing a resist bake plate simulator | Bhanwar Singh, Qiaolin Zhang, Iraj Emami, Joyce S. Oey Hewett | 2008-02-19 | $10,551,000 |