Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7334202 | Optimizing critical dimension uniformity utilizing a resist bake plate simulator | Bhanwar Singh, Qiaolin Zhang, Iraj Emami, Joyce S. Oey Hewett | 2008-02-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7334202 | Optimizing critical dimension uniformity utilizing a resist bake plate simulator | Bhanwar Singh, Qiaolin Zhang, Iraj Emami, Joyce S. Oey Hewett | 2008-02-19 |