| 7460922 |
Scanner optimization for reduced across-chip performance variation through non-contact electrical metrology |
Bhanwar Singh, Jason P. Cain, Harish K. Bolla |
2008-12-02 |
| 7373215 |
Transistor gate shape metrology using multiple data sources |
Jason P. Cain, Bhanwar Singh |
2008-05-13 |
| 7334202 |
Optimizing critical dimension uniformity utilizing a resist bake plate simulator |
Bhanwar Singh, Qiaolin Zhang, Joyce S. Oey Hewett, Luigi Capodiece |
2008-02-19 |
| 7221060 |
Composite alignment mark scheme for multi-layers in lithography |
Bhanwar Singh, Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian |
2007-05-22 |
| 7158896 |
Real time immersion medium control using scatterometry |
Bhanwar Singh, Srikanteswara Dakshina-Murthy, Khoi A. Phan, Ramkumar Subramanian, Bharath Rangarajan |
2007-01-02 |
| 6560504 |
Use of contamination-free manufacturing data in fault detection and classification as well as in run-to-run control |
Thomas J. Goodwin, Charles E. May |
2003-05-06 |
| 6452412 |
Drop-in test structure and methodology for characterizing an integrated circuit process flow and topography |
Richard W. Jarvis, Charles E. May |
2002-09-17 |
| 6297644 |
Multipurpose defect test structure with switchable voltage contrast capability and method of use |
Richard W. Jarvis, John L. Nistler, Michael G. McIntyre |
2001-10-02 |
| 6294397 |
Drop-in test structure and abbreviated integrated circuit process flow for characterizing production integrated circuit process flow, topography, and equipment |
Richard W. Jarvis, Charles E. May |
2001-09-25 |
| 6268717 |
Semiconductor test structure with intentional partial defects and method of use |
Richard W. Jarvis, Alan Bruce Berezin |
2001-07-31 |
| 6242273 |
Fractal filter applied to a contamination-free manufacturing signal to improve signal-to-noise ratios |
Thomas J. Goodwin, Charles E. May |
2001-06-05 |