| 9343666 |
Damascene metal-insulator-metal (MIM) device with improved scaleability |
Suzette K. Pangrle, Steven C. Avanzino, Sameer Haddad, Michael VanBuskirk, Manuj Rathor +5 more |
2016-05-17 |
$12,063,000 |
| 8232175 |
Damascene metal-insulator-metal (MIM) device with improved scaleability |
Suzette K. Pangrle, Steven C. Avanzino, Sameer Haddad, Michael VanBuskirk, Manuj Rathor +5 more |
2012-07-31 |
$2,423,000 |
| 8089113 |
Damascene metal-insulator-metal (MIM) device |
Suzette K. Pangrle, Steven C. Avanzino, Sameer Haddad, Michael VanBuskirk, Manuj Rathor +5 more |
2012-01-03 |
$2,103,000 |
| 7468296 |
Thin film germanium diode with low reverse breakdown |
Ercan Adem, Matthew S. Buynoski, Robert J. Chiu, Calvin T. Gabriel, Joong S. Jeon +5 more |
2008-12-23 |
|
| 7173648 |
System and method for visually monitoring a semiconductor processing system |
Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh |
2007-02-06 |
$46,392,000 |
| 7080330 |
Concurrent measurement of critical dimension and overlay in semiconductor manufacturing |
Bharath Rangarajan, Bhanwar Singh, Carmen Morales |
2006-07-18 |
$7,111,000 |
| 6912438 |
Using scatterometry to obtain measurements of in circuit structures |
Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan |
2005-06-28 |
$6,294,000 |
| 6884999 |
Use of scanning probe microscope for defect detection and repair |
Sanjay K. Yedur, Bhanwar Singh |
2005-04-26 |
$7,241,000 |
| 6829380 |
Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system |
Bhanwar Singh, Sanjay K. Yedur |
2004-12-07 |
$8,137,000 |
| 6635874 |
Self-cleaning technique for contamination on calibration sample in SEM |
Bhanwar Singh, Michael K. Templeton, Sanjay K. Yedur |
2003-10-21 |
$8,084,000 |
| 6634805 |
Parallel plate development |
Michael K. Templeton, Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian |
2003-10-21 |
$8,084,000 |
| 6632283 |
System and method for illuminating a semiconductor processing system |
Bhanwar Singh, Bharath Rangarajan, Khoi A. Phan, Ramkumar Subramanian |
2003-10-14 |
$7,133,000 |
| 6591658 |
Carbon nanotubes as linewidth standards for SEM & AFM |
Sanjay K. Yedur, Bhanwar Singh, Michael K. Templeton, Ramkumar Subramanian |
2003-07-15 |
$1,952,000 |
| 6572252 |
System and method for illuminating a semiconductor processing system |
Bharath Rangarajan, Bhanwar Singh, Khoi A. Phan, Ramkumar Subramanian |
2003-06-03 |
$3,251,000 |
| 6566655 |
Multi-beam SEM for sidewall imaging |
Bhanwar Singh, Sanjay K. Yedur |
2003-05-20 |
$2,116,000 |
| 6559446 |
System and method for measuring dimensions of a feature having a re-entrant profile |
Bhanwar Singh |
2003-05-06 |
$2,132,000 |
| 6516528 |
System and method to determine line edge roughness and/or linewidth |
Bhanwar Singh |
2003-02-11 |
$2,033,000 |
| 6507474 |
Using localized ionizer to reduce electrostatic charge from wafer and mask |
Bhanwar Singh, Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan |
2003-01-14 |
$2,234,000 |
| 6479820 |
Electrostatic charge reduction of photoresist pattern on development track |
Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan, Khoi A. Phan |
2002-11-12 |
$1,765,000 |
| 6479817 |
Cantilever assembly and scanning tip therefor with associated optical sensor |
Sanjay K. Yedur, Bhanwar Singh, Carmen Morales |
2002-11-12 |
$1,765,000 |
| 6462343 |
System and method of providing improved CD-SEM pattern recognition of structures with variable contrast |
— |
2002-10-08 |
$890,000 |
| 6459482 |
Grainless material for calibration sample |
Bhanwar Singh, Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Michael K. Templeton +1 more |
2002-10-01 |
$734,000 |
| 6455847 |
Carbon nanotube probes in atomic force microscope to detect partially open/closed contacts |
Sanjay K. Yedur, Bhanwar Singh |
2002-09-24 |
$1,057,000 |
| 6452161 |
Scanning probe microscope having optical fiber spaced from point of hp |
Sanjay K. Yedur, Bhanwar Singh, Carmen Morales |
2002-09-17 |
$1,456,000 |
| 6451512 |
UV-enhanced silylation process to increase etch resistance of ultra thin resists |
Bharath Rangarajan, Ramkumar Subramanian, Khoi A. Phan, Bhanwar Singh, Michael K. Templeton +1 more |
2002-09-17 |
$1,456,000 |
