Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444381 | Electron beam flood exposure technique to reduce the carbon contamination | Bhanwar Singh, Ramkumar Subramanian, Michael K. Templeton, Bharath Rangarajan, Khoi A. Phan +1 more | 2002-09-03 |
| 6437329 | Use of carbon nanotubes as chemical sensors by incorporation of fluorescent molecules within the tube | Sanjay K. Yedur, Bhanwar Singh | 2002-08-20 |
| 6423479 | Cleaning carbon contamination on mask using gaseous phase | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Sanjay K. Yedur | 2002-07-23 |
| 6396059 | Using a crystallographic etched silicon sample to measure and control the electron beam width of a SEM | Bhanwar Singh, Sanjay K. Yedur | 2002-05-28 |
| 6371134 | Ozone cleaning of wafers | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Sanjay K. Yedur | 2002-04-16 |
| 6373053 | Analysis of CD-SEM signal to detect scummed/closed contact holes and lines | Bhanwar Singh, Sanjay K. Yedur, Khoi A. Phan | 2002-04-16 |
| 6354133 | Use of carbon nanotubes to calibrate conventional tips used in AFM | Sanjay K. Yedur, Bhanwar Singh, Michael K. Templeton, Ramkumar Subramanian | 2002-03-12 |
| 6319643 | Conductive photoresist pattern for long term calibration of scanning electron microscope | Bhanwar Singh, Ramkumar Subramanian | 2001-11-20 |
| 6190062 | Cleaning chamber built into SEM for plasma or gaseous phase cleaning | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Sanjay K. Yedur | 2001-02-20 |
| 5977542 | Restoration of CD fidelity by dissipating electrostatic charge | Bhanwar Singh, Subash Gupta | 1999-11-02 |