| 7943289 |
Inverse resist coating process |
Bharath Rangarajan, Ramkumar Subramanian |
2011-05-17 |
$9,308,000 |
| 7153364 |
Re-circulation and reuse of dummy-dispensed resist |
Bharath Rangarajan, Ramkumar Subramanian, Khoi A. Phan, Ursula Q. Quinto |
2006-12-26 |
$21,181,000 |
| 7145653 |
In situ particle monitoring for defect reduction |
Bharath Rangarajan |
2006-12-05 |
$14,281,000 |
| 7100826 |
Barcode marking of wafer products for inventory control |
Khoi A. Phan, Bhanwar Singh |
2006-09-05 |
$18,723,000 |
| 7078348 |
Dual layer patterning scheme to make dual damascene |
Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan |
2006-07-18 |
$7,111,000 |
| 6905950 |
Growing copper vias or lines within a patterned resist using a copper seed layer |
Ramkumar Subramanian, Bhanwar Singh, Bharath Rangarajan |
2005-06-14 |
$5,811,000 |
| 6889763 |
System for rapidly and uniformly cooling resist |
Ramkumar Subramanian, Bharath Rangarajan |
2005-05-10 |
$7,763,000 |
| 6879051 |
Systems and methods to determine seed layer thickness of trench sidewalls |
Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian |
2005-04-12 |
$6,806,000 |
| 6845345 |
System for monitoring and analyzing diagnostic data of spin tracks |
Bhanwar Singh, Ramkumar Subramanian |
2005-01-18 |
$6,792,000 |
| 6834158 |
Pinhole defect repair by resist flow |
— |
2004-12-21 |
$5,396,000 |
| 6830389 |
Parallel plate development with the application of a differential voltage |
— |
2004-12-14 |
$6,995,000 |
| 6828162 |
System and method for active control of BPSG deposition |
Arvind Halliyal, Bhanwar Singh, Ramkumar Subramanian |
2004-12-07 |
$8,137,000 |
| 6819427 |
Apparatus of monitoring and optimizing the development of a photoresist material |
Ramkumar Subramanian, Bharath Rangarajan |
2004-11-16 |
$6,082,000 |
| 6778268 |
System and method for process monitoring of polysilicon etch |
Bhanwar Singh, Bharath Rangarajan |
2004-08-17 |
$3,269,000 |
| 6774989 |
Interlayer dielectric void detection |
Bharath Rangarajan, Arvind Halliyal, Bhanwar Singh |
2004-08-10 |
$1,968,000 |
| 6771374 |
Scatterometry based measurements of a rotating substrate |
Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian |
2004-08-03 |
$1,898,000 |
| 6752899 |
Acoustic microbalance for in-situ deposition process monitoring and control |
Bhanwar Singh, Arvind Halliyal |
2004-06-22 |
$4,162,000 |
| 6746822 |
Use of surface coupling agent to improve adhesion |
Bharath Rangarajan, Bhanwar Singh |
2004-06-08 |
$3,316,000 |
| 6727195 |
Method and system for decreasing the spaces between wordlines |
Mark S. Chang |
2004-04-27 |
$2,236,000 |
| 6704101 |
Scatterometry based measurements of a moving substrate |
Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian |
2004-03-09 |
$3,777,000 |
| 6688784 |
Parallel plate development with multiple holes in top plate for control of developer flow and pressure |
— |
2004-02-10 |
$3,739,000 |
| 6670271 |
Growing a dual damascene structure using a copper seed layer and a damascene resist structure |
Ramkumar Subramanian, Bhanwar Singh, Bharath Rangarajan |
2003-12-30 |
$4,545,000 |
| 6663723 |
Vapor drying for cleaning photoresists |
Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan |
2003-12-16 |
$3,174,000 |
| 6664191 |
Non self-aligned shallow trench isolation process with disposable space to define sub-lithographic poly space |
Unsoon Kim, Yider Wu, Yu Sun, Angela T. Hui, Chi Chang |
2003-12-16 |
$3,174,000 |
| 6650422 |
Scatterometry techniques to ascertain asymmetry profile of features and generate a feedback or feedforward process control data associated therewith |
Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian |
2003-11-18 |
$4,875,000 |
