Issued Patents All Time
Showing 25 most recent of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943289 | Inverse resist coating process | Bharath Rangarajan, Ramkumar Subramanian | 2011-05-17 |
| 7153364 | Re-circulation and reuse of dummy-dispensed resist | Bharath Rangarajan, Ramkumar Subramanian, Khoi A. Phan, Ursula Q. Quinto | 2006-12-26 |
| 7145653 | In situ particle monitoring for defect reduction | Bharath Rangarajan | 2006-12-05 |
| 7100826 | Barcode marking of wafer products for inventory control | Khoi A. Phan, Bhanwar Singh | 2006-09-05 |
| 7078348 | Dual layer patterning scheme to make dual damascene | Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan | 2006-07-18 |
| 6905950 | Growing copper vias or lines within a patterned resist using a copper seed layer | Ramkumar Subramanian, Bhanwar Singh, Bharath Rangarajan | 2005-06-14 |
| 6889763 | System for rapidly and uniformly cooling resist | Ramkumar Subramanian, Bharath Rangarajan | 2005-05-10 |
| 6879051 | Systems and methods to determine seed layer thickness of trench sidewalls | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2005-04-12 |
| 6845345 | System for monitoring and analyzing diagnostic data of spin tracks | Bhanwar Singh, Ramkumar Subramanian | 2005-01-18 |
| 6834158 | Pinhole defect repair by resist flow | — | 2004-12-21 |
| 6830389 | Parallel plate development with the application of a differential voltage | — | 2004-12-14 |
| 6828162 | System and method for active control of BPSG deposition | Arvind Halliyal, Bhanwar Singh, Ramkumar Subramanian | 2004-12-07 |
| 6819427 | Apparatus of monitoring and optimizing the development of a photoresist material | Ramkumar Subramanian, Bharath Rangarajan | 2004-11-16 |
| 6778268 | System and method for process monitoring of polysilicon etch | Bhanwar Singh, Bharath Rangarajan | 2004-08-17 |
| 6774989 | Interlayer dielectric void detection | Bharath Rangarajan, Arvind Halliyal, Bhanwar Singh | 2004-08-10 |
| 6771374 | Scatterometry based measurements of a rotating substrate | Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian | 2004-08-03 |
| 6752899 | Acoustic microbalance for in-situ deposition process monitoring and control | Bhanwar Singh, Arvind Halliyal | 2004-06-22 |
| 6746822 | Use of surface coupling agent to improve adhesion | Bharath Rangarajan, Bhanwar Singh | 2004-06-08 |
| 6727195 | Method and system for decreasing the spaces between wordlines | Mark S. Chang | 2004-04-27 |
| 6704101 | Scatterometry based measurements of a moving substrate | Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian | 2004-03-09 |
| 6688784 | Parallel plate development with multiple holes in top plate for control of developer flow and pressure | — | 2004-02-10 |
| 6670271 | Growing a dual damascene structure using a copper seed layer and a damascene resist structure | Ramkumar Subramanian, Bhanwar Singh, Bharath Rangarajan | 2003-12-30 |
| 6663723 | Vapor drying for cleaning photoresists | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan | 2003-12-16 |
| 6664191 | Non self-aligned shallow trench isolation process with disposable space to define sub-lithographic poly space | Unsoon Kim, Yider Wu, Yu Sun, Angela T. Hui, Chi Chang | 2003-12-16 |
| 6650422 | Scatterometry techniques to ascertain asymmetry profile of features and generate a feedback or feedforward process control data associated therewith | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2003-11-18 |