Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7702471 | Determining one or more profile parameters of a photomask covered by a pellicle | Shifang Li | 2010-04-20 |
| 7639375 | Determining transmittance of a photomask using optical metrology | Shifang Li, Youxian Wen, Wei Liu, Hanyou Chu, Ying Ying Luo | 2009-12-29 |
| 7518740 | Evaluating a profile model to characterize a structure to be examined using optical metrology | Jeffrey A. Chard, Junwei Bao, Youxian Wen | 2009-04-14 |
| 7480062 | Automated process control using parameters determined from a photomask covered by a pellicle | Shifang Li, Manuel Madriaga | 2009-01-20 |
| 7394554 | Selecting a hypothetical profile to use in optical metrology | Vi Vuong, Junwei Bao, Srinivas Doddi, Emmanuel Drege, Jin Wen +3 more | 2008-07-01 |
| 7092110 | Optimized model and parameter selection for optical metrology | Raghu Balasubramanian, Vi Vuong, Nickhil Jakatdar | 2006-08-15 |
| 7046375 | Edge roughness measurement in optical metrology | Joerg Bischoff, Emmanuel Drege | 2006-05-16 |
| 6884999 | Use of scanning probe microscope for defect detection and repair | Bhanwar Singh, Bryan K. Choo | 2005-04-26 |
| 6829380 | Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system | Bryan K. Choo, Bhanwar Singh | 2004-12-07 |
| 6813574 | Topographically aligned layers and method for adjusting the relative alignment of layers and apparatus therefor | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2004-11-02 |
| 6635874 | Self-cleaning technique for contamination on calibration sample in SEM | Bhanwar Singh, Michael K. Templeton, Bryan K. Choo | 2003-10-21 |
| 6605855 | CVD plasma process to fill contact hole in damascene process | Bhanwar Singh, Michael K. Templeton, Bharath Rangarajan, Christopher F. Lyons, Ramkumar Subramanian | 2003-08-12 |
| 6591658 | Carbon nanotubes as linewidth standards for SEM & AFM | Bhanwar Singh, Bryan K. Choo, Michael K. Templeton, Ramkumar Subramanian | 2003-07-15 |
| 6592932 | Nozzle arm movement for resist development | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton | 2003-07-15 |
| 6566655 | Multi-beam SEM for sidewall imaging | Bryan K. Choo, Bhanwar Singh | 2003-05-20 |
| 6545273 | Use of multiple tips on AFM to deconvolve tip effects | Bhanwar Singh, Bharath Rangarajan | 2003-04-08 |
| 6541184 | Nozzle arm movement for resist development | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton | 2003-04-01 |
| 6479817 | Cantilever assembly and scanning tip therefor with associated optical sensor | Bhanwar Singh, Bryan K. Choo, Carmen Morales | 2002-11-12 |
| 6459482 | Grainless material for calibration sample | Bhanwar Singh, Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Michael K. Templeton +1 more | 2002-10-01 |
| 6455847 | Carbon nanotube probes in atomic force microscope to detect partially open/closed contacts | Bhanwar Singh, Bryan K. Choo | 2002-09-24 |
| 6452161 | Scanning probe microscope having optical fiber spaced from point of hp | Bhanwar Singh, Bryan K. Choo, Carmen Morales | 2002-09-17 |
| 6451512 | UV-enhanced silylation process to increase etch resistance of ultra thin resists | Bharath Rangarajan, Ramkumar Subramanian, Khoi A. Phan, Bhanwar Singh, Michael K. Templeton +1 more | 2002-09-17 |
| 6444381 | Electron beam flood exposure technique to reduce the carbon contamination | Bhanwar Singh, Ramkumar Subramanian, Michael K. Templeton, Bharath Rangarajan, Khoi A. Phan +1 more | 2002-09-03 |
| 6441349 | System for facilitating uniform heating temperature of photoresist | Bharath Rangarajan, Bhanwar Singh | 2002-08-27 |
| 6437329 | Use of carbon nanotubes as chemical sensors by incorporation of fluorescent molecules within the tube | Bhanwar Singh, Bryan K. Choo | 2002-08-20 |