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Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturing |
Kevin Chan, Nickhil Jakatdar, Svetlana Litvintseva, Mark A. Miller, Francis Raquel |
2013-03-26 |
| 8302052 |
Methods, systems, and computer program product for implementing hotspot detection, repair, and optimization of an electronic circuit design |
Brian Lee, Srinivas Doddi, Ron Pyke, Taber H. Smith |
2012-10-30 |
| 8156450 |
Method and system for mask optimization |
Kevin Chan, Nickhil Jakatdar, Svetlana Litvintseva, Mark A. Miller, Francis Raquel |
2012-04-10 |
| 8146024 |
Method and system for process optimization |
Kevin Chan, Nickhil Jakatdar, Svetlana Litvintseva, Mark A. Miller, Francis Raquel |
2012-03-27 |
| 7831528 |
Optical metrology of structures formed on semiconductor wafers using machine learning systems |
Srinivas Doddi, Nickhil Jakatdar, Junwei Bao |
2010-11-09 |
| 7694244 |
Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturing |
Kevin Chan, Nickhil Jakatdar, Svetlana Litvintseva, Mark A. Miller, Francis Raquel |
2010-04-06 |
| 7665048 |
Method and system for inspection optimization in design and production of integrated circuits |
Kevin Chan, Nickhil Jakatdar, Svetlana Litvintseva, Mark A. Miller, Francis Raquel |
2010-02-16 |
| 7588949 |
Optical metrology model optimization based on goals |
Vi Vuong, Shifang Li, Junwei Bao |
2009-09-15 |
| 7523076 |
Selecting a profile model for use in optical metrology using a machine learning system |
Srinivas Doddi, Junwei Bao |
2009-04-21 |
| 7505153 |
Model and parameter selection for optical metrology |
Vi Vuong, Junwei Bao, Srinivas Doddi, Xinhui Niu, Nickhil Jakatdar |
2009-03-17 |
| 7474993 |
Selection of wavelengths for integrated circuit optical metrology |
Srinivas Doddi, Lawrence Lane, Vi Vuong, Michael Laughery, Junwei Bao +2 more |
2009-01-06 |
| 7394554 |
Selecting a hypothetical profile to use in optical metrology |
Vi Vuong, Junwei Bao, Srinivas Doddi, Jin Wen, Sanjay K. Yedur +3 more |
2008-07-01 |
| 7330279 |
Model and parameter selection for optical metrology |
Vi Vuong, Junwei Bao, Srinivas Doddi, Xinhui Niu, Nickhil Jakatdar |
2008-02-12 |
| 7216045 |
Selection of wavelengths for integrated circuit optical metrology |
Srinivas Doddi, Lawrence Lane, Vi Vuong, Mike Laughery, Junwei Bao +2 more |
2007-05-08 |
| 7171284 |
Optical metrology model optimization based on goals |
Vi Vuong, Shifang Ll, Junwei Bao |
2007-01-30 |
| 7046375 |
Edge roughness measurement in optical metrology |
Joerg Bischoff, Sanjay K. Yedur |
2006-05-16 |
| 6853942 |
Metrology hardware adaptation with universal library |
Junwei Bao, Srinivas Doddi, Vi Vuong |
2005-02-08 |
| 6842261 |
Integrated circuit profile value determination |
Junwei Bao, Wen Jin, Srinivas Doddi, Vi Vuong |
2005-01-11 |