Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7216045 | Selection of wavelengths for integrated circuit optical metrology | Srinivas Doddi, Lawrence Lane, Vi Vuong, Junwei Bao, Kelly Barry +2 more | 2007-05-08 |
| 6780550 | Single pass lithography overlay technique | Makoto Miyagi | 2004-08-24 |