Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7630873 | Approximating eigensolutions for use in determining the profile of a structure formed on a semiconductor wafer | Joerg Bischoff, Karl Hehl, Wen Jin | 2009-12-08 |
| 7593119 | Generation of a library of periodic grating diffraction signals | Nickhil Jakatdar | 2009-09-22 |
| 7586623 | Optical metrology of single features | Joerg Bischoff, Junwei Bao | 2009-09-08 |
| 7580823 | Generation and use of integrated circuit profile-based simulation information | Nickhil Jakatdar, Junwei Bao | 2009-08-25 |
| 7505153 | Model and parameter selection for optical metrology | Vi Vuong, Emmanuel Drege, Junwei Bao, Srinivas Doddi, Nickhil Jakatdar | 2009-03-17 |
| 7450232 | Generic interface for an optical metrology system | Shifang Li, Junwei Bao, Nickhil Jakatdar | 2008-11-11 |
| 7427521 | Generating simulated diffraction signals for two-dimensional structures | Joerg Bischoff | 2008-09-23 |
| 7414733 | Azimuthal scanning of a structure formed on a semiconductor wafer | Joerg Bischoff, Shifang Li | 2008-08-19 |
| 7379192 | Optical metrology of single features | Joerg Bischoff, Junwei Bao | 2008-05-27 |
| 7330279 | Model and parameter selection for optical metrology | Vi Vuong, Emmanuel Drege, Junwei Bao, Srinivas Doddi, Nickhil Jakatdar | 2008-02-12 |
| 7277189 | Generation of a library of periodic grating diffraction signals | Nickhil Jakatdar | 2007-10-02 |
| 7271902 | Generic interface for an optical metrology system | Shifang Li, Junwei Bao, Nickhil Jakatdar | 2007-09-18 |
| 7224471 | Azimuthal scanning of a structure formed on a semiconductor wafer | Joerg Bischoff, Shifang Li | 2007-05-29 |
| 7136796 | Generation and use of integrated circuit profile-based simulation information | Nickhil Jakatdar, Junwei Bao | 2006-11-14 |
| 7072049 | Model optimization for structures with additional materials | Nickhil Jakatdar | 2006-07-04 |
| 7064829 | Generic interface for an optical metrology system | Shifang Li, Junwei Bao, Nickhil Jakatdar | 2006-06-20 |
| 7041515 | Balancing planarization of layers and the effect of underlying structure on the metrology signal | Nickhil Jakatdar | 2006-05-09 |
| 7031894 | Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings | Nickhil Jakatdar | 2006-04-18 |
| 7030999 | Optical metrology of single features | Joerg Bischoff, Junwei Bao | 2006-04-18 |
| 6961679 | Method and system of dynamic learning through a regression-based library generation process | Nickhil Jakatdar | 2005-11-01 |
| 6952271 | Caching of intra-layer calculations for rapid rigorous coupled-wave analyses | Nickhil Jakatdar | 2005-10-04 |
| 6947141 | Overlay measurements using zero-order cross polarization measurements | Joerg Bischoff | 2005-09-20 |
| 6943900 | Generation of a library of periodic grating diffraction signals | Nickhil Jakatdar | 2005-09-13 |
| 6928395 | Method and system for dynamic learning through a regression-based library generation process | Nickhil Jakatdar | 2005-08-09 |
| 6891626 | Caching of intra-layer calculations for rapid rigorous coupled-wave analyses | Nickhil Jakatdar | 2005-05-10 |