Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855464 | Grating test patterns and methods for overlay metrology | Nickhil Jakatdar | 2005-02-15 |
| 6839145 | Optical profilometry of additional-material deviations in a periodic grating | Nickhil Jakatdar | 2005-01-04 |
| 6833914 | System and method for efficient simulation of reflectometry response from two-dimensional grating structures | Junwei Bao, Nickhil Jakatdar | 2004-12-21 |
| 6804005 | Overlay measurements using zero-order cross polarization measurements | Joerg Bischoff | 2004-10-12 |
| 6785638 | Method and system of dynamic learning through a regression-based library generation process | Nickhil Jakatdar | 2004-08-31 |
| 6775015 | Optical metrology of single features | Joerg Bischoff, Junwei Bao | 2004-08-10 |
| 6772084 | Overlay measurements using periodic gratings | Joerg Bischoff, Nickhil Jakatdar | 2004-08-03 |
| 6750961 | System and method for characterizing macro-grating test patterns in advanced lithography and etch processes | Nickhil Jakatdar | 2004-06-15 |
| 6743646 | Balancing planarization of layers and the effect of underlying structure on the metrology signal | Nickhil Jakatdar | 2004-06-01 |
| 6699624 | Grating test patterns and methods for overlay metrology | Nickhil Jakatdar | 2004-03-02 |
| 6694275 | Profiler business model | Nickhil Jakadar | 2004-02-17 |
| 6645824 | Combined optical profilometry and projection microscopy of integrated circuit structures | Wenge Yang, Junwei Bao, Nickhil Jakatdar, Yasuhiro Okumoto | 2003-11-11 |
| 6636843 | System and method for grating profile classification | Srinivas Doddi, Nickhil Jakatdar | 2003-10-21 |
| 6608686 | Measurement of metal electroplating and seed layer thickness and profile | Lawrence Lane, Nickhil Jakatdar | 2003-08-19 |
| 6608690 | Optical profilometry of additional-material deviations in a periodic grating | Nickhil Jakatdar | 2003-08-19 |
| 6538731 | System and method for characterizing macro-grating test patterns in advanced lithography and etch processes | Nickhil Jakatdar | 2003-03-25 |
| 6433878 | Method and apparatus for the determination of mask rules using scatterometry | Nickhil Jakatdar | 2002-08-13 |