Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423479 | Cleaning carbon contamination on mask using gaseous phase | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Bryan K. Choo | 2002-07-23 |
| 6396059 | Using a crystallographic etched silicon sample to measure and control the electron beam width of a SEM | Bhanwar Singh, Bryan K. Choo | 2002-05-28 |
| 6376013 | Multiple nozzles for dispensing resist | Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton | 2002-04-23 |
| 6373053 | Analysis of CD-SEM signal to detect scummed/closed contact holes and lines | Bryan K. Choo, Bhanwar Singh, Khoi A. Phan | 2002-04-16 |
| 6371134 | Ozone cleaning of wafers | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Bryan K. Choo | 2002-04-16 |
| 6354133 | Use of carbon nanotubes to calibrate conventional tips used in AFM | Bhanwar Singh, Bryan K. Choo, Michael K. Templeton, Ramkumar Subramanian | 2002-03-12 |
| 6326231 | Use of silicon oxynitride ARC for metal layers | Ramkumar Subramanian, Bhanwar Singh, Marina V. Plat, Christopher F. Lyons, Bharath Rangarajan +1 more | 2001-12-04 |
| 6270579 | Nozzle arm movement for resist development | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton | 2001-08-07 |
| 6248175 | Nozzle arm movement for resist development | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton | 2001-06-19 |
| 6245493 | Method for reducing surface reflectivity by increasing surface roughness | Bhanwar Singh, Bharath Rangarajan, Michael K. Templeton, Christopher F. Lyons | 2001-06-12 |
| 6197455 | Lithographic mask repair using a scanning tunneling microscope | Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton, Kathleen R. Early | 2001-03-06 |
| 6191046 | Deposition of an oxide layer to facilitate photoresist rework on polygate layer | Bhanwar Singh, Bharath Rangarajan | 2001-02-20 |
| 6190062 | Cleaning chamber built into SEM for plasma or gaseous phase cleaning | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Bryan K. Choo | 2001-02-20 |
| 6187666 | CVD plasma process to fill contact hole in damascene process | Bhanwar Singh, Michael K. Templeton, Bharath Rangarajan, Christopher F. Lyons, Ramkumar Subramanian | 2001-02-13 |
| 6117618 | Carbonized antireflective coating produced by spin-on polymer material | Bhanwar Singh, Bharath Rangarajan, Michael K. Templeton | 2000-09-12 |
| 6057914 | Method for detecting and identifying a lens aberration by measurement of sidewall angles by atomic force microscopy | Bhanwar Singh, Bharath Rangarajan | 2000-05-02 |
| 6034771 | System for uniformly heating photoresist | Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton | 2000-03-07 |