Issued Patents All Time
Showing 51–75 of 259 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7052921 | System and method using in situ scatterometry to detect photoresist pattern integrity during the photolithography process | Marina V. Plat, Calvin T. Gabriel, Christopher F. Lyons, Scott A. Bell, Ramkumar Subramanian +1 more | 2006-05-30 |
| 7052575 | System and method for active control of etch process | Bharath Rangarajan, Ramkumar Subramanian | 2006-05-30 |
| 7008832 | Damascene process for a T-shaped gate electrode | Ramkumar Subramanian, Christopher F. Lyons, Marina V. Plat | 2006-03-07 |
| 7001830 | System and method of pattern recognition and metrology structure for an X-initiative layout design | Khoi A. Phan, Bharath Rangarajan | 2006-02-21 |
| 6999254 | Refractive index system monitor and control for immersion lithography | Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian | 2006-02-14 |
| 6995433 | Microdevice having non-linear structural component and method of fabrication | Todd P. Lukanc, Sarah N. McGowan, Luigi Capodieci, Joerg Reiss | 2006-02-07 |
| 6982043 | Scatterometry with grating to observe resist removal rate during etch | Ramkumar Subramanian, Bharath Rangarajan, Catherine B. Labelle, Christopher F. Lyons | 2006-01-03 |
| 6974652 | Lithographic photomask and method of manufacture to improve photomask test measurement | Todd P. Lukanc, Luigi Capodieci, Christopher A. Spence | 2005-12-13 |
| 6972576 | Electrical critical dimension measurement and defect detection for reticle fabrication | Christopher F. Lyons, Khoi A. Phan, Cyrus E. Tabery | 2005-12-06 |
| 6972201 | Using scatterometry to detect and control undercut for ARC with developable BARCs | Ramkumar Subramanian, Khoi A. Phan | 2005-12-06 |
| 6954678 | Artificial intelligence system for track defect problem solving | Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian | 2005-10-11 |
| 6934032 | Copper oxide monitoring by scatterometry/ellipsometry during nitride or BLOK removal in damascene process | Ramkumar Subramanian, Steven C. Avanzino, Bharath Rangarajan | 2005-08-23 |
| 6931618 | Feed forward process control using scatterometry for reticle fabrication | Cyrus E. Tabery, Bharath Rangarajan, Ramkumar Subramanian | 2005-08-16 |
| 6924157 | Real time particle monitor inside of plasma chamber during resist strip processing | Khoi A. Phan, Bharath Rangarajan | 2005-08-02 |
| 6915177 | Comprehensive integrated lithographic process control system based on product design and yield feedback system | Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian | 2005-07-05 |
| 6912438 | Using scatterometry to obtain measurements of in circuit structures | Bryan K. Choo, Ramkumar Subramanian, Bharath Rangarajan | 2005-06-28 |
| 6905950 | Growing copper vias or lines within a patterned resist using a copper seed layer | Ramkumar Subramanian, Michael K. Templeton, Bharath Rangarajan | 2005-06-14 |
| 6884999 | Use of scanning probe microscope for defect detection and repair | Sanjay K. Yedur, Bryan K. Choo | 2005-04-26 |
| 6879051 | Systems and methods to determine seed layer thickness of trench sidewalls | Michael K. Templeton, Bharath Rangarajan, Ramkumar Subramanian | 2005-04-12 |
| 6878560 | Fab correlation system | Bharath Rangarajan, Ramkumar Subramanian | 2005-04-12 |
| 6879406 | Use of scatterometry as a control tool in the manufacture of extreme UV masks | Bharath Rangarajan, Ramkumar Subramanian | 2005-04-12 |
| 6869888 | E-beam flood exposure of spin-on material to eliminate voids in vias | Marina V. Plat, Ramkumar Subramanian, Christopher F. Lyons | 2005-03-22 |
| 6849469 | Monitor and control of silicidation using fourier transform infrared scatterometry | Ciby Thuruthiyil, Ramkumar Subramanian | 2005-02-01 |
| 6845345 | System for monitoring and analyzing diagnostic data of spin tracks | Michael K. Templeton, Ramkumar Subramanian | 2005-01-18 |
| 6844206 | Refractive index system monitor and control for immersion lithography | Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian | 2005-01-18 |